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Henrik Frederiksen

     Henrik Frederiksen

Processing competence: Process and equipment specialist in Physical Vapor Deposition (sputtering, evaporation, pulsed laser deposition) of thin films, resposible for most of the PVD equipment at MC2. Background in thin film related R&D, as well as manufacturing and installation of thin film deposition and etching equipment.

Tel: +46 31 772 18 73

Mobile: +46 73 3088864

List of tools where Henrik Frederiksen is tool responsible

 NameTypeTool Id
DetailsSputter - FHRSputter400
DetailsSputter - NORDIKOSputter401
DetailsEvaporator - VarianElectron beam evaporation406
DetailsSputter - BalzersSputter407
DetailsDry etch RIE - Advanced VacuumRIE etch418
DetailsDry etch RIE - Plasma-ThermRIE etch419
DetailsEvaporator - AVACElectron beam evaporation420
DetailsEvaporator - EdwardsThermal evaporation425
DetailsSputter - PfeifferSputter426
DetailsSputter - AJASputter427
DetailsSputter - DCA - QuantumSputter428
DetailsPLD - Small SystemPulsed Laser Deposition11401
DetailsPLD - Compex 205 LaserPulsed Laser Deposition1141
DetailsPLD - Calas SystemPulsed Laser Deposition11411
DetailsPLD - RHEED SystemPulsed Laser Deposition11412
DetailsPLD - DCA ClusterPulsed Laser Deposition1142
DetailsSputter - DCA Cluster - OxidesSputter1143
DetailsSputter - DCA Cluster - MetalsSputter1144
DetailsPLD - Carbon SystemPulsed Laser Deposition11413
DetailsEvaporator - PlassysElectron beam evaporation521
DetailsEvaporator - Lesker PVD 225 #2Electron beam evaporation452
DetailsDry etch RIE - Plasma-Therm - OxygenRIE etch422
DetailsCVD - MgB2 - PVD hybrid 1165
DetailsCVD - Parylene 1180
DetailsEvaporator - Plassys UHV 522