Myfab User Meeting
Chalmers, Gothenburg April 12 - 13, 2011
Tuesday April 12
RunAn in Chalmers Kårhus/Student building, close to Chalmers main entrance
09.00 Registration, coffee, Sign up for lab tours. Mounting of posters in MC2 09.00 – 10:30.
10:30 – 10:45 Opening address. About MUM’11, some notes on Myfabs and its development, practical issues. Stefan Bengtsson and Thomas Swahn.
10:45 – 12:30 Plenary session with invited presentations highlights from within Myfab.
• Invited: Francis Balestra, MINATEC, Grenoble: "Integration of European nanofabrication laboratories"
• Myfab highlight: Jan Grahn, Chalmers: “Low power low noise HEMT – cutting edge results at Myfab
12.30 – 14:00 Lunch
14:00 – 15:30 Plenary sessions, three presentation:
• Myfab invited Highlight: Shili Zhang
• Myfab invited Highlight: Anders Ljunggren, ÅAC Microtec
• Myfab invited Highlight: Per-Erik Hellström: ”Nanodevices in silicon and related materials”
MC2
Coffee/Te available at 15:30
16:00 – 18:00 Poster Session in MC2 Canyon and lab tours to Myfab MC2 Nanofabrication laboratory. Group visits 16:00 – 16:40, 16:20 – 17:00, 16:40 – 17:20, 17:00 – 17:40, 17:20 – 18:00, 17:40 – 18:20.
19:00 Dinner at Universeum
Welcome toast, guided tours and dinner at Universeum. By foot: see map. By tram: take tram number 6 och 8 from Chalmers main entrance, Chalmersplatsen, in the direction into the tunnel, to next stop at Korsvägen. Universeum is located next to Korsvägen within sight. www.universeum.se
Wednesday April 13
RunAn and smaller rooms in Chalmers Kårhus
09:00 – 12:00 Thematic sessions (50 minutes each): tutorials and discussions.
Three rooms (Ledningsrummet, Valdemar, Catella), parallel sessions.
Coffee available from 09:50.
Valdemar
09:00-09:50 Lena Klintberg: “The back-end processing line at Ångström”
10:00-10:50 Christoph Henkel: ”Atomic Layer Deposition (ALD)”
11:00-11:50 Mats Hagberg: “Dry etching methods”
Catella
09:00-09:50 Piotr Jedrasik: “High Resolution Electron Beam Lithography”
10:00-10:50 Anders Holmberg: “EBL and related processes at Albanova for sub-15-nm high-aspect-ratio structures”
11:00-11:50 Anders Hallén: “MEIS and other ion-beam analysis methods”
Ledningsrummet
09:00-09:50 Per Wehlin: “Building of a web-based Quality System at the Myfab portal”
10:00-10:50 Carl Junesand: ”Heteroepitaxy of mismatched materials: Aggravations, approaches and applications"
11:00-11:50 Sofia Svedhem, Rickard Arvidsson and Ulf Södervall: “Aspects of Nanosafety within Myfab activities.”
If the attendees is evenly distributed between the parallel sessions these three rooms should work. If not the session with the largest number of attendees can move into RunAn.
12:00 – 13:15 Lunch
13:15 – 14:00 Invited: Peter Parbrook, Tyndal National Institute, Cork, Ireland. “III-Nitride Semiconductor Optoelectronics: Moving from the Visible to the Ultra-Violet”
14:00 – 14:30 Myfab invited highlight: Adolf Schöner, Acreo: ”Recent progress in SiC device processing”
14:30 – 14:45 Concluding remarks.