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Myfab Chalmers
KTH/RISE
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Process service, Electrum
External Processes
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Myfab Lund
Myfab Uppsala
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Myfab
Myfab Chalmers
KTH/RISE
Access and Support
Resources
Epitaxy
Thin film deposition
Lithography
Dry etching
Thermal processes
Wet processes
Other processes
Dice mounting
Materials and Device Characterization
All tools
Process service, Electrum
Aluminium etching process
Atomic Layer Deposition
Coater and Developer Cluster
Epitaxial deposition of III/V-based compounds
Nitride deposition process
Oxidation and temperature anneal
Oxide etching process
External Processes
Ion Implantation
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Myfab Lund
Myfab Uppsala
KTH/RISE
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Presentation
Presentation
Electrum laboratory folder
Presentation Electrum laboratory
(2020)
2020-06-30
Laboratory Director