Realize your nano vision


Epitaxy is the art of growing perfect crystals at a crystalline substrate, with nanometer precision in thicknesses and accurate composition control.

We have the capacity to grow

  • Si/SiGe on Si substrates
  • InGaAsP(N) on InP and GaAs substrates
  • AlGaAs on GaAs substrates
  • SiC on Si and SiC substrates
Click on heading to sort the table.
(Extract from LIMS)
DetailsEpsilon2000 SiGe epitaxyASM200Si-epi
DetailsAsterixAixtron AIX 200/4Movpe
DetailsObelixAixtronLP-VPE 2106
DetailsNapoleonAixtronVP508GFR SiC epi
DetailsLPE 106LPEPE106
DetailsFrejAixtronFlip Top CCS MOVPE System



2020-06-30 Quality group (P)