Cleanroom operation in its current form was started in 2001. The Laboratory is a state-of-the-art facility with 1240 m2 of cleanroom classified area with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technology.
Cleanroom classes
| Laboratory |
Size |
Fed. Std.209 E Class |
ISO 14644-1 Class |
| Lab 1 |
1 000 m² |
10-100 |
4-5 |
| Lab 2 |
240 m² |
1000-10000 |
6-7 |
Vibration spectra
|
Vibrational spectrum from foot traffic on the floor
compared with the Vibration Criteria VC-E Curve:
|
Vibration spectrum caused by trams compared
with the Vibration Criteria VC-E Curve:
|